A Company Connecting the Future of Industry Through Smart Heating Technology
Safety & Accessories
Interlock Bellows
Product Overview
Interlock Bellows is used between the Pump and Scrubber in CVD and Etching thin-film equipment. Its proprietary Interlock structure provides corrosion resistance, enhanced durability, and stability in high-temperature environments. It guides internal flow from turbulence to laminar flow, preventing oxide buildup and protecting the bellows from high-temperature gases and chemicals.
Key Features
- Interlock structure prevents turbulence and enhances corrosion and heat resistance
- Works with flexible tube mechanisms for vibration absorption and flexible installation
- Minimizes foreign-matter and powder deposition, suppresses internal corrosion, and ensures long service life
- High-temperature blocking function prevents burns and safety hazards
- Flat, smooth internal surface allows stable gas flow and prevents damage
- Compatible with a wide range of materials including SUS304, SUS316L, SUS316Ti, and SUS321
